[E-1-4] Simple Models on Enhancement of Mechanical Properties of Porous Silica Low-k Films by Tetramethylcyclotetrasiloxane(TMCTS) Vapor Annealing Treatment

Yutaka Seino, Rie Ichikawa, Yuko Takasu, Kazuo Kohmura, Hirofumi Tanaka, Shunsuke Oike, Masami Murakami, Takamaro Kikkawa (1.MIRAI, Advanced Semiconductor Research Center, 2.Advanced Semiconductor Research Center, AIST, 3.MIRAI, Association of Super-Advanced Electronics Technologies, 4.Research Center for Nanodevices and Systems, Hiroshima University)

https://doi.org/10.7567/SSDM.2004.E-1-4