[E-1-4] Simple Models on Enhancement of Mechanical Properties of Porous Silica Low-k Films by Tetramethylcyclotetrasiloxane(TMCTS) Vapor Annealing Treatment

Yutaka Seino、Rie Ichikawa、Yuko Takasu、Kazuo Kohmura、Hirofumi Tanaka、Shunsuke Oike、Masami Murakami、Takamaro Kikkawa (1.MIRAI, Advanced Semiconductor Research Center、2.Advanced Semiconductor Research Center, AIST、3.MIRAI, Association of Super-Advanced Electronics Technologies、4.Research Center for Nanodevices and Systems, Hiroshima University)

https://doi.org/10.7567/SSDM.2004.E-1-4