[E-1-5] Microstructure Characterization of Skeletal Silica in Porous Low-k Films by Infrared Spectroscopic Ellipsometry

Syozo Takada, Nobuhiro Hata, Yutaka Seino, Nobutoshi Fujii, Takamaro Kikkawa (1.ASRC, AIST, 2.MIRAI-ASRC, AIST, 3.MIRAI-ASET, 4.RCNS, Hiroshima University)

https://doi.org/10.7567/SSDM.2004.E-1-5