[E-1-5] Microstructure Characterization of Skeletal Silica in Porous Low-k Films by Infrared Spectroscopic Ellipsometry

Syozo Takada、Nobuhiro Hata、Yutaka Seino、Nobutoshi Fujii、Takamaro Kikkawa (1.ASRC, AIST、2.MIRAI-ASRC, AIST、3.MIRAI-ASET、4.RCNS, Hiroshima University)

https://doi.org/10.7567/SSDM.2004.E-1-5