[E-2-1] Reliability Issues in High-k Stacks

R. Degraeve、F. Crupi、M. Houssa、D. H. Kwak、A. Kerber、E. Cartier、T. Kauerauf、Ph. Roussel、J.L. Autran、G. Pourtois、L. Pantisano、S. De Gendt、M.M. Heyns、G. Groeseneken (1.IMEC、2.University of Calabria, Italy、3.Samsung Electronics c/o IMEC、4.Infineon Technologies, Germany、5.IBM, USA、6.Catholic University Leuven, Belgium、7.University of Provence, France)

https://doi.org/10.7567/SSDM.2004.E-2-1