[E-2-1] Reliability Issues in High-k Stacks

R. Degraeve, F. Crupi, M. Houssa, D. H. Kwak, A. Kerber, E. Cartier, T. Kauerauf, Ph. Roussel, J.L. Autran, G. Pourtois, L. Pantisano, S. De Gendt, M.M. Heyns, G. Groeseneken (1.IMEC, 2.University of Calabria, Italy, 3.Samsung Electronics c/o IMEC, 4.Infineon Technologies, Germany, 5.IBM, USA, 6.Catholic University Leuven, Belgium, 7.University of Provence, France)

https://doi.org/10.7567/SSDM.2004.E-2-1