[G-3-5] Monolithic integration of UTC-PDs and InP HBTs using Be ion implantation

Norihide Kashio, Shoji Yamahata, Minoru Ida, Kenji Kurishima, Kimikazu Sano, Takatomo Enoki (1.NTT Photonics Laboratories, NTT Corporation)

https://doi.org/10.7567/SSDM.2004.G-3-5