[G-7-3] InGaN/GaN Multi-Quantum-Well Nanorods Fabricated by Plasma Etching Using Self-assembled Nickel Nano-masks
Tao-Hung Hsueh, Hung-Wen Huang, Chih-Chiang Kao, Ya-Hsien Chang, Miaochia Ou-Yang, Hao-Chung Kuo, Shing-Chung Wang
(1.Institute of Electro-Optical Engineering, National Chiao Tung University)
https://doi.org/10.7567/SSDM.2004.G-7-3