[G-7-3] InGaN/GaN Multi-Quantum-Well Nanorods Fabricated by Plasma Etching Using Self-assembled Nickel Nano-masks

Tao-Hung Hsueh、Hung-Wen Huang、Chih-Chiang Kao、Ya-Hsien Chang、Miaochia Ou-Yang、Hao-Chung Kuo、Shing-Chung Wang (1.Institute of Electro-Optical Engineering, National Chiao Tung University)

https://doi.org/10.7567/SSDM.2004.G-7-3