[G-7-3] InGaN/GaN Multi-Quantum-Well Nanorods Fabricated by Plasma Etching Using Self-assembled Nickel Nano-masks

Tao-Hung Hsueh, Hung-Wen Huang, Chih-Chiang Kao, Ya-Hsien Chang, Miaochia Ou-Yang, Hao-Chung Kuo, Shing-Chung Wang (1.Institute of Electro-Optical Engineering, National Chiao Tung University)

https://doi.org/10.7567/SSDM.2004.G-7-3