The Japan Society of Applied Physics

[H-1-2] Solid-electrolyte nanometer switch implemented in Si LSI

T. Sakamoto、S. Kaeriyama、H. Sunamura、M. Mizuno、H. Kawaura、T. Hasegawa、K. Terabe、T. Nakayama、M. Aono (1.Fundamental & Environmental Research Labs., NEC Corp.、2.ICORP, Japan Science & Technology Agency (JST)、3.System Devices Research Labs., NEC Corp.、4.Nanomaterials Laboratory, NIMS)

https://doi.org/10.7567/SSDM.2004.H-1-2