[H-10-4] Reduced Mesa-Sidewall Leakage Current in InGaAs/InP MSM Photodetector by BCB Sidewall Process

Wei-Yu Chiu, Fan-Hsiu Huang, Yen-Shian Wu, Don-Ming Lin, Shu-Han Chen, Jin-Wei Shi, Jen-Inn Chyi, Yi-Jen Chan (1.Department of Electrical Engineering, National Central University)

https://doi.org/10.7567/SSDM.2004.H-10-4