[H-10-4] Reduced Mesa-Sidewall Leakage Current in InGaAs/InP MSM Photodetector by BCB Sidewall Process

Wei-Yu Chiu、Fan-Hsiu Huang、Yen-Shian Wu、Don-Ming Lin、Shu-Han Chen、Jin-Wei Shi、Jen-Inn Chyi、Yi-Jen Chan (1.Department of Electrical Engineering, National Central University)

https://doi.org/10.7567/SSDM.2004.H-10-4