[P10-5] Superior SONOS Flash Memory with Tapered-Bandgap Nitride Layer

Kuo-Hong Wu, Tung-Sheng Chen, Chin-Hsing Kao, Hua-Ching Chien, Tzung-Kuen Tsai, Jui-Wen Chang, Chih-Chiang Chan, Chao-Hsin Chien, Kung-Hong Lee, Ya-Chin King (1.Chung-Cheng Institute of Technology, National Defense University, 2.National Nano Device Laboratories, 3.National Tsing-Hua University)

https://doi.org/10.7567/SSDM.2004.P10-5