[P10-5] Superior SONOS Flash Memory with Tapered-Bandgap Nitride Layer

Kuo-Hong Wu、Tung-Sheng Chen、Chin-Hsing Kao、Hua-Ching Chien、Tzung-Kuen Tsai、Jui-Wen Chang、Chih-Chiang Chan、Chao-Hsin Chien、Kung-Hong Lee、Ya-Chin King (1.Chung-Cheng Institute of Technology, National Defense University、2.National Nano Device Laboratories、3.National Tsing-Hua University)

https://doi.org/10.7567/SSDM.2004.P10-5