The Japan Society of Applied Physics

[P11-2] The low-k BCB passivation layer on the GaN HEMTs

Wen-Kai Wang, Ching-Huao Lin, Po-Chen Lin, Cheng-Kuo Lin, Fan-Hsiu Huang, Yi-Jen Chan, Guan-Ting Chen, Jen-Inn Chyi (1.Department of Electrical Engineering, National Central University)

https://doi.org/10.7567/SSDM.2004.P11-2