[P13-14L] The physical and micro structural properties of PECVD grown amorphous carbon films on the contribution to n-C:P/p-Si solar cells

Mohamad Rusop、Hiroshi Ebisu、Mitsuhiro Adachi、Tetsuo Soga、Takashi Jimbo (1.Department of Environmental Technology and Urban Planning;、2.Department of Electrical and Computer Engineering, Nagoya Institute of Technology)

https://doi.org/10.7567/SSDM.2004.P13-14L