The physical and micro structural properties of PECVD grown amorphous carbon films on the contribution to n-C:P/p-Si solar cells

Mohamad Rusop; Hiroshi Ebisu; Mitsuhiro Adachi; Tetsuo Soga; Takashi Jimbo

doi:https://doi.org/10.7567/SSDM.2004.P13-14L

[P13-14L] The physical and micro structural properties of PECVD grown amorphous carbon films on the contribution to n-C:P/p-Si solar cells

Mohamad Rusop, Hiroshi Ebisu, Mitsuhiro Adachi, Tetsuo Soga, Takashi Jimbo (1.Department of Environmental Technology and Urban Planning;, 2.Department of Electrical and Computer Engineering, Nagoya Institute of Technology)

https://doi.org/10.7567/SSDM.2004.P13-14L

2004 International Conference on Solid State Devices and Materials

[P13-14L] The physical and micro structural properties of PECVD grown amorphous carbon films on the contribution to n-C:P/p-Si solar cells