[P3-14] Theoretical Study of Chemical Mechanical Polishing of SiO2 Surface

Arivazhagan Rajendran, Yasufumi Takahashi, Hideyuki Tsuboi, Michihisa Koyama, Momoji Kubo, Akira Miyamoto (1.Department of Applied Chemistry, Graduate School of Engineering, Tohoku University, 2.JST-PRESTO, 3.New Industry Creation Hatchery Center, Tohoku University)

https://doi.org/10.7567/SSDM.2004.P3-14