[P3-19] Molecular Dynamics (MD) Calculation for Low-energy Ion Implantation Process with Dynamic Annealing Effect

Ohseob Kwon, Jihyun Seo, Kidong Kim, Taeyoung Won (1.National IT Research Center for Computational Electronics and Department of Electrical Engineering, School of Electrical and Computer Engineering, Inha University)

https://doi.org/10.7567/SSDM.2004.P3-19