TDS measurement for low-k porous silica films incorporated with ethylene groups

2004 International Conference on Solid State Devices and Materials

Sep 14, 2004 - Sep 17, 2004
Tower Hall Funabori, Tokyo, Japan

Yasutaka Uchida, Yoshiyuki Maruya, Tomohiro Katoh, Yoshito Ito, Koichi Ishida (1.Teikyo Univ. of Sci & Tech, Dept of Media Science)