[P3-4] Control of UV Radiation Damages for the High Sensitive CCD Image Sensor

Yasushi Ishikawa, Yuji Katoh, Mitsuru Okigawa, Seiji Samukawa (1.Intelligent Nano-Process laboratory, Institute of Fluid Science, Tohoku University, 2.Sanyo Electric Co., Ltd., Component Group, Semiconductor Company, CCD Business Unit, Development Department)

https://doi.org/10.7567/SSDM.2004.P3-4