[P3-8] Improving Characteristics of Tantalum Oxide Thin Film Devices with Copper Electrodes

Kou-Chiang Tsai, Wen-Fa Wu, Cheng-Ping Kuan, Chi-Chang Wu, Chuen-Guang Chao (1.Department of Materials Science and Engineering, National Chiao-Tung University, 2.National Nano Device Laboratories)

https://doi.org/10.7567/SSDM.2004.P3-8