[P4-1] Lateral Graphoepitaxy of Germanium Controlled by Microholes on SiO2 Surface

Takahiro Numai、Takeshi Koide、Takashi Minemoto、Hideyuki Takakura、Yoshihiro Hamakawa (1.Ritsumeikan University, College of Science and Engineering)

https://doi.org/10.7567/SSDM.2004.P4-1