[P5-13] Contactless Characterization of Fixed Charge in HfO2 Thin Film by Photoreflectance

Masayuki Sohgawa, Masato Yoshida, Takuji Naoyama, Taizou Tada, Koji Ikeda, Takeshi Kanashima, Akira Fujimoto, Masanori Okuyama (1.Area of Advanced Electronics and Optical Science, Department of Systems Innovation, Graduate School of Engineering Science, Osaka University, 2.Department of Electrical Engineering, Wakayama National College of Technology)

https://doi.org/10.7567/SSDM.2004.P5-13