[P5-2] Characterization of Pore Size Distributions in Ultralow-k Films

N. Hata, N. Fujii, H. Miyoshi, X. Li, T. Kikkawa (1.MIRAI-ASRC, AIST, 2.ASRC, AIST, 3.MIRAI-ASET, 4.RCNS, Hiroshima University)

https://doi.org/10.7567/SSDM.2004.P5-2