[P5-2] Characterization of Pore Size Distributions in Ultralow-k Films

N. Hata、N. Fujii、H. Miyoshi、X. Li、T. Kikkawa (1.MIRAI-ASRC, AIST、2.ASRC, AIST、3.MIRAI-ASET、4.RCNS, Hiroshima University)

https://doi.org/10.7567/SSDM.2004.P5-2