[P5-3] Low-Temperature Formation of Poly-Si1-xGex (x: 0-1) on SiO2 by Au-Mediated Lateral Crystallization

Hiroshi Kanno、Tomohisa Aoki、Atsushi Kenjo、Taizoh Sadoh、Masanobu Miyao (1.Kyushu University, Department of Electronics)

https://doi.org/10.7567/SSDM.2004.P5-3