[P5-7] Depth Profiling of Si/Si1-xGex Structures by Micro-Raman Imaging

Takeshi Mitani, Shinichi Nakashima, Hajime Okumura, Atsushi Ogura (1.National Institute of Advanced Industrial Science and Technology, Power Electronics Research Center, 2.Meiji University, School of Science and Engineering)

https://doi.org/10.7567/SSDM.2004.P5-7