Depth Profiling of Si/Si1-xGex Structures by Micro-Raman Imaging

Takeshi Mitani; Shinichi Nakashima; Hajime Okumura; Atsushi Ogura

doi:https://doi.org/10.7567/SSDM.2004.P5-7

[P5-7] Depth Profiling of Si/Si1-xGex Structures by Micro-Raman Imaging

Takeshi Mitani、Shinichi Nakashima、Hajime Okumura、Atsushi Ogura (1.National Institute of Advanced Industrial Science and Technology, Power Electronics Research Center、2.Meiji University, School of Science and Engineering)

https://doi.org/10.7567/SSDM.2004.P5-7

2004 International Conference on Solid State Devices and Materials

[P5-7] Depth Profiling of Si/Si1-xGex Structures by Micro-Raman Imaging