[P5-9] Thermal Stability and Electrical Properties of (La2O3)1-x(Al2O3)x Composite Films

Ryota Fujitsuka, Mitsuo Sakashita, Akira Sakai, Shigeaki Zaima, Yukio Yasuda (1.Graduate School of Engineering, Nagoya University)

https://doi.org/10.7567/SSDM.2004.P5-9