[P7-5] Electron-Beam Lithography and Thermal Development to Fluorinated Polyarylate

Masahiro Tomiki, Naomichi Okamoto, Okihiro Sugihara (1.Shizuoka Univ., Dept. of Electrical and Electronic Eng., 2.Shizuoka Univ., Dept. of Electrical and Electronic Eng., 3.Tohoku Univ., Institute of Multidisciplinary Research for Advanced Materials)

https://doi.org/10.7567/SSDM.2004.P7-5