[A-5-2] Local Current Leakage Characterization in La2O3-Al2O3 Composite Films by Conductive Atomic Force Microscopy

Akiyoshi Seko, Toshifumi Sago, Mitsuo Sakashita, Akira Sakai, Masaki Ogawa, Shigeaki Zaima (1.Graduate School of Engineering, Nagoya University, 2.Center for Cooperative Research in Advanced Science & Technology, Nagoya University)

https://doi.org/10.7567/SSDM.2005.A-5-2