[A-5-2] Local Current Leakage Characterization in La2O3-Al2O3 Composite Films by Conductive Atomic Force Microscopy

Akiyoshi Seko、Toshifumi Sago、Mitsuo Sakashita、Akira Sakai、Masaki Ogawa、Shigeaki Zaima (1.Graduate School of Engineering, Nagoya University、2.Center for Cooperative Research in Advanced Science & Technology, Nagoya University)

https://doi.org/10.7567/SSDM.2005.A-5-2