[C-1-2] Mechanical Strength of Multilayered Dielectric Structures Measured by Laser-Pulse Generated Surface-Acoustic-Wave Technique

Toshinori Takimura、Nobuhiro Hata、Takahiro Nakayama、Yoshinori Shishida、Ryotaro Yagi、Jun Kawahara、Shinichi Chikaki、Nobutoshi Fujii、Takamaro Kikkawa (1.ASRC, AIST、2.MIRAI-ASRC, AIST、3.MIRAI-ASET、4.RCNS, Hiroshima University)

https://doi.org/10.7567/SSDM.2005.C-1-2