[C-1-2] Mechanical Strength of Multilayered Dielectric Structures Measured by Laser-Pulse Generated Surface-Acoustic-Wave Technique

Toshinori Takimura, Nobuhiro Hata, Takahiro Nakayama, Yoshinori Shishida, Ryotaro Yagi, Jun Kawahara, Shinichi Chikaki, Nobutoshi Fujii, Takamaro Kikkawa (1.ASRC, AIST, 2.MIRAI-ASRC, AIST, 3.MIRAI-ASET, 4.RCNS, Hiroshima University)

https://doi.org/10.7567/SSDM.2005.C-1-2