[C-1-4] A Novel Short-time Characterization Method of SIV Properties by Using the Empirical Equation

M. TAKAHASHI、T. HARADA、N. MITSU、K. TSUKAMOTO、S. OGAWA、T. UEDA (1.Matsushita Semi-Conductor Engineering Co. Ltd.、2.ULSI Process Technology Development Center, Semiconductor Company, Matsushita Electric Industrial Co. Ltd.)

https://doi.org/10.7567/SSDM.2005.C-1-4