[C-1-4] A Novel Short-time Characterization Method of SIV Properties by Using the Empirical Equation

M. TAKAHASHI, T. HARADA, N. MITSU, K. TSUKAMOTO, S. OGAWA, T. UEDA (1.Matsushita Semi-Conductor Engineering Co. Ltd., 2.ULSI Process Technology Development Center, Semiconductor Company, Matsushita Electric Industrial Co. Ltd.)

https://doi.org/10.7567/SSDM.2005.C-1-4