[C-1-5] Electrical Characteristics of Porous Zeolite Interlayer Dielectrics

Takenobu YOSHINO、Guoqing GUAN、Nobuhiro HATA、Nobutoshi FUJII、Takamaro KIKKAWA (1.MIRAI, Advanced Semiconductor Research Center (ASRC), National Institute of Advanced Industrial Science and Technology (AIST), and、2.ASRC, AIST、3.MIRAI, Association of Super-Advanced Electronics Technology (ASET)、4.Research Center for Nanodevices and Systems (RCNS), Hiroshima University)

https://doi.org/10.7567/SSDM.2005.C-1-5