[C-9-4] Function of Phase Switch Layer for Ultra Shallow Junction Formation by Green Laser Annealing

Akira Matsuno, Kentaro Shibahara (1.Reseach Center for Nanodevices and Systems, Hiroshima University, 2.Phoeton Corp.)

https://doi.org/10.7567/SSDM.2005.C-9-4