[D-1-2] Piezoresistive Rotation Angle Sensor Integrated in Micromirror

Minoru Sasaki、Motoki Tabata、Tsukasa Haga、Kazuhiro Hane (1.Tohoku University, Dept. of Nanomechanics)

https://doi.org/10.7567/SSDM.2005.D-1-2