[D-9-1] Development of an Integrated RF Impedance Matching Device with LPF Function using a CoFeB Magnetic/Polyimide Dielectric Hybrid Thin-Film Coplanar-Line

H. Nakayama, T. Yamamoto, Y. Mizoguchi, T. Sato, K. Yamasawa, Y. Miura, Y. Miyake, M. Akie, Y. Uehara, M. Munakata, M. Yagi (1.Nagano National College of Technology, 2.Faculty of Engineering, Shinshu University, 3.Fujitsu Limited, 4.Energy Electronics Laboratory, Sojo University)

https://doi.org/10.7567/SSDM.2005.D-9-1