The Japan Society of Applied Physics

[F-1-3] Electrical, Optical and Structure Properties of ITO Films Cosputtered with ZnO

Day-Shan Liu, Chun-Ching Wu, Chun-Hsing Lin, Ching-Ting Lee (1.Institute of Electro-Optical and Materials Science, National Formosa University, 2.Institute of Microelectronics, Department of Electrical Engineering, National Cheng Kung University)

https://doi.org/10.7567/SSDM.2005.F-1-3