The Japan Society of Applied Physics

[F-1-3] Electrical, Optical and Structure Properties of ITO Films Cosputtered with ZnO

Day-Shan Liu、Chun-Ching Wu、Chun-Hsing Lin、Ching-Ting Lee (1.Institute of Electro-Optical and Materials Science, National Formosa University、2.Institute of Microelectronics, Department of Electrical Engineering, National Cheng Kung University)

https://doi.org/10.7567/SSDM.2005.F-1-3