[F-1-4] A Piezoelectric ZnO Film Prepared by RF Magnetron Sputtering

Day-Shan Liu, Cheng-Hsien Li, Cheng-Yang Wu, Ching-Ting Lee (1.Institute of Electro-Optical and Materials Science, National Formosa University, 2.Institute of Microelectronics, Department of Electrical Engineering, National Cheng Kung University)

https://doi.org/10.7567/SSDM.2005.F-1-4