[F-4-5] Nanoporous Ultra Low-k Dielectrics Prepared with Covalently Bonded Adamantylphenol Pore Generators

Bong Jun Cha, Suhan Kim, Kookheon Char (1.School of Chemical and Biological Engineering and NANO Systems Institute-National Core Research Center Seoul National University)

https://doi.org/10.7567/SSDM.2005.F-4-5