Nanoporous Ultra Low-k Dielectrics Prepared with Covalently Bonded Adamantylphenol Pore Generators

Bong Jun Cha; Suhan Kim; Kookheon Char

doi:https://doi.org/10.7567/SSDM.2005.F-4-5

2005 International Conference on Solid State Devices and Materials

2005年9月12日〜 2005年9月15日
International Conference Center Kobe, Kobe, Japan

[F-4-5] Nanoporous Ultra Low-k Dielectrics Prepared with Covalently Bonded Adamantylphenol Pore Generators

Bong Jun Cha、Suhan Kim、Kookheon Char (1.School of Chemical and Biological Engineering and NANO Systems Institute-National Core Research Center Seoul National University)

https://doi.org/10.7567/SSDM.2005.F-4-5

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