[G-9-5] The Influence of Oxygen Concentration in the Sputtering Gas on the Self-synthesis of Tungsten Oxide Nanowires on Sputter-deposited Tungsten Films

Shui-Jinn Wang、Chao-Hsuing Chen、Rong-Ming Ko、Yi-Cheng Kuo、Yu-Yu Wang (1.Institute of Microelectronics, Department of Electrical Engineering, National Cheng Kung University)

https://doi.org/10.7567/SSDM.2005.G-9-5