[H-10-1] Highly Reliable Ring Type Contact Scheme for High Density PRAM

C.W. Jeong、S.J. Ahn、Y.N. Hwang、Y.J. Song、J.H. Oh、S.Y. Lee、S.H. Lee、K.C. Ryoo、J.H. Park、J.M. Shin、Jae-Hyun Park、F. Yeung、W.C. Jeong、Y.T. Kim、K.H. Koh、G.T. Jeong、H.S. Jeong、K.N. Kim (1.Advanced Technology Development, CAE Team, Semiconductor R&D Div., Samsung Electronics Co., Ltd)

https://doi.org/10.7567/SSDM.2005.H-10-1