The Japan Society of Applied Physics

[H-10-1] Highly Reliable Ring Type Contact Scheme for High Density PRAM

C.W. Jeong, S.J. Ahn, Y.N. Hwang, Y.J. Song, J.H. Oh, S.Y. Lee, S.H. Lee, K.C. Ryoo, J.H. Park, J.M. Shin, Jae-Hyun Park, F. Yeung, W.C. Jeong, Y.T. Kim, K.H. Koh, G.T. Jeong, H.S. Jeong, K.N. Kim (1.Advanced Technology Development, CAE Team, Semiconductor R&D Div., Samsung Electronics Co., Ltd)