[H-4-1] Feasibility analysis of direct tunneling through medium-κ dielectrics for embedded RAM applications

B. Govoreanu, R. Degraeve, T. Kauerauf, W. Magnus, D. Wellekens, G. Groeseneken, J. Van Houdt (1.IMEC, 2.Katholieke Universiteit Leuven, ESAT Dept.)

https://doi.org/10.7567/SSDM.2005.H-4-1