[H-5-4] Silicon-Nitride-Coated Silicon Biochip for Real-time Optical Sensing of Biomolecular Interaction

Toru Fujimura, Shin-ichi Taniguchi, Kei Takenaka, Yasushi Goto (1.Advanced Research Laboratory, Hitachi, Ltd.)

https://doi.org/10.7567/SSDM.2005.H-5-4